A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents
نویسندگان
چکیده
The presence of chemical warfare agents (CWAs) in the environment is a serious threat to human safety, but there are many problems with currently available detection methods for CWAs. For example, gas chromatography–mass spectrometry cannot be used in-field owing rather large size equipment required, while commercial sensors have disadvantages low sensitivity and poor selectivity. Here, we develop portable sensing instrument CWA that consists MEMS-fabricated micro-preconcentrator (μPC) film bulk acoustic resonator (FBAR) sensor. μPC coated nanoporous metal–organic framework material enrich target, FBAR provides rapid without need extra carrier gas. Dimethyl methylphosphonate (DMMP), simulant agent sarin, test performance instrument. Experimental results show effective sample pretreatment, sensor has good DMMP vapor. combination one gives full play their respective advantages, reducing limit analyte. Moreover, both fabricated using CMOS-compatible approach, prototype compact high portability thus potential application
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ژورنال
عنوان ژورنال: Nanotechnology and Precision Engineering
سال: 2022
ISSN: ['2589-5540', '1672-6030']
DOI: https://doi.org/10.1063/10.0009664